Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
David M. Braun0
Deanna J. Bergstrom0
Date of Patent
November 20, 2007
Patent Application Number
10771495
Date Filed
February 4, 2004
Patent Primary Examiner
Patent abstract
Mircodevice processing systems. One exemplary embodiment includes a component for removing substrate material to form a feature into a first surface of a substrate, and a component for measuring a thickness of a portion of the substrate defining the feature, wherein the component for measuring is positioned proximate a second surface of the substrate that is different than the first surface.
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