US Patent 7299538 Method for fabricating micro-electro-mechanical systems
Patent 7299538 was granted and assigned to WiSpry on November, 2007 by the United States Patent and Trademark Office.
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Patent Inventor Names
Svetlana Tactic-Lucic0
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Patent abstract
The present invention relates to micro-electro-mechanical systems (MEMS). The present invention relates to a design feature that allows lower actuation voltage for electrostatically actuated structures (i.e., switches or mirrors). The present invention further relates to a method for fabricating such a design that allows lower actuation voltage.
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US Patent 07299538 Method for fabricating micro-electro-mechanical systems US Patent 7299538 Method for fabricating micro-electro-mechanical systems
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Patent Number
072995380
Patent Number
72995380
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Current Assignee
Patent Jurisdiction
Patent Number
072995380
Date of Patent
November 27, 2007
0Patent Application Number
109667950
Date Filed
October 14, 2004
0Official Website
Patent Primary Examiner
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US Patent 07299538 Method for fabricating micro-electro-mechanical systems
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Is a
Current assignee
Patent jurisdiction
Patent number
07299538
Date of patent
November 27, 2007
Patent application number
10966795
Date Filed
October 14, 2004
Patent primary examiner
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