Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hugh Li0
Kai Hu0
Matthew R. VanHanehem0
Zhendong Liu0
Jinru Bian0
John Quanci0
Date of Patent
November 27, 2007
Patent Application Number
10670534
Date Filed
September 25, 2003
Patent Primary Examiner
Patent abstract
The solution is useful for removing a barrier material from a semiconductor substrate. The solution comprises, by weight percent, 0.01 to 25 oxidizer, 0 to 15 inhibitor for a nonferrous metal, 0 to 15 abrasive, 0 to 20 complexing agent for the nonferrous metal, 0.01 to 12 barrier removal agent and balance water. The barrier removal agent is selected from the group comprising imine derivative compounds, hydrazine derivative compounds and mixtures thereof.
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