Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Thomas L. Ritzdorf0
Zhongmin Hu0
Lyndon W. Graham0
Date of Patent
November 27, 2007
Patent Application Number
10667802
Date Filed
September 22, 2003
Patent Primary Examiner
Patent abstract
The present invention is directed to methods and compositions for depositing a noble metal alloy onto a microelectronic workpiece. In one particular aspect of the invention, a platinum metal alloy is electrochemically deposited on a surface of the workpiece from an acidic plating composition. The plated compositions when combined with high-k dielectric material are useful in capacitor structures.
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