Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Akira Takashima0
Masato Koyama0
Tsunehiro Ino0
Yuuichi Kamimuta0
Akira Nishiyama0
Masahiro Koike0
Masamichi Suzuki0
Date of Patent
November 27, 2007
0Patent Application Number
114070660
Date Filed
April 20, 2006
0Patent Primary Examiner
Patent abstract
Disclosed is a semiconductor device comprising a substrate, an insulating film formed above the substrate and containing a metal, Si, N and O, the insulating film containing metal-N bonds larger than the sum total of metal-metal bonds and metal-Si bonds, and an electrode formed above the insulating film.
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