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US Patent 7303467 Chemical mechanical polishing apparatus with rotating belt

Patent 7303467 was granted and assigned to Applied Materials on December, 2007 by the United States Patent and Trademark Office.

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Patent abstract

A chemical mechanical polishing apparatus has a movable platen, a drive mechanism and a chucking mechanism. The drive mechanism is attached to the platen, is configured to support a generally linear polishing sheet with a portion of the polishing sheet extending over the platen, and is configured to incrementally advance the polishing sheet in a linear direction relative to the platen. The chucking mechanism is configured to intermittently secure the portion of the polishing sheet to the platen.

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