US Patent 7303973 ALD process for capacitor dielectric
Patent 7303973 was granted and assigned to Elpida Memory on December, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 29, 2003
0
Date of Patent
December 4, 2007
0
Patent Application Number
10630444
0
Patent Inventor Names
Hiroshi Sakuma
0
Kenichi Koyanagi
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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