US Patent 7303985 Zeolite-carbon doped oxide composite low k dielectric

Patent 7303985 was granted and assigned to Intel on December, 2007 by the United States Patent and Trademark Office.

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Patent Inventor Names

Hai Deng0

Huey-Chiang Liou0

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Patent abstract

A method for forming a zeolite-carbon doped oxide (CDO) composite dielectric material is herein described. Zeolite particles may be dispersed in a solvent. The zeolite solvent solution may then be deposited on an underlying layer, such as a wafer of other dielectric layer. At least some solvent may then be removed to form a zeolite film. A CDO may then be deposited in the zeolite film to form a zeolite-CDO composite film/dielectric. The zeolite-CDO composite film/dielectric may then be calcinated to form a solid phase zeolite-CDO composite dilectric.

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https://pdfpiw.uspto.gov/.piw?Docid=073039850

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