Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Matthias Schnuerer0
Sargis Ter-Avetisyan0
Peter-Viktor Nickles0
Date of Patent
December 11, 2007
0Patent Application Number
105388020
Date Filed
December 11, 2003
0Patent Primary Examiner
Patent abstract
An apparatus for making a droplet target provided with a chamber for receiving a target liquid and maintained under pressure, an electromagnetic valve switched at a ms rate for feeding target liquid from the receptacle to a heated expansion channel for converting the target liquid to supersaturated vapor and connected to a supersonic nozzle wherein the supersaturated vapor is cooled and condensed to droplets before they are discharged.
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