Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 1, 2008
Patent Application Number
09807589
Date Filed
March 17, 2000
Patent Citations Received
Patent Primary Examiner
Patent abstract
Reaction chamer (10) for an epitaxial reactor comprising a belljar (14) made of insulating, transparent and chemically resistant material, a susceptor (24) provided with disk-shaped cavities (34a-n) for receiving wafers (36a-n) of material to be treated and having an insulating and chemically resistant plate (40) arranged above it, and a diffuser (54) consisting of a plurality of outlet pipes (106a-f) mounted on a cap (52) fixed to an upper opening (50) of the belljar (14).
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