US Patent 7316963 Method for manufacturing semiconductor device
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Patent Inventor Names
Won Wook Lee0
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Patent abstract
Disclosed herein is a method for manufacturing a semiconductor device. According to the present invention, a device isolation film having a step difference occurring during a process of forming a device isolation film in a scribe lane region serves as a first alignment key, and a second alignment key formed during a process of forming a recess gate region is used in the subsequent process, thereby improving the process steps and product cost.
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US Patent 07316963 Method for manufacturing semiconductor device US Patent 7316963 Method for manufacturing semiconductor device
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Patent Number
073169630
Patent Number
73169630
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Patent Jurisdiction
Patent Number
073169630
Date of Patent
January 8, 2008
0Patent Application Number
113215900
Date Filed
December 30, 2005
0Official Website
Patent Primary Examiner
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US Patent 07316963 Method for manufacturing semiconductor device
Infobox
Is a
Patent jurisdiction
Patent number
07316963
Date of patent
January 8, 2008
Patent application number
11321590
Date Filed
December 30, 2005
Patent primary examiner
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