US Patent 7316969 Method and apparatus for thermally treating substrates
Patent 7316969 was granted and assigned to Mattson Technology on January, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 5, 2006
Date of Patent
January 8, 2008
Patent Application Number
11446675
Patent Citations Received
Patent Inventor Names
Christoph Striebel
0
Markus Hauf
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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