Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Alexander Straaijer0
Date of Patent
January 8, 2008
0Patent Application Number
111201980
Date Filed
May 3, 2005
0Patent Primary Examiner
Patent abstract
A lithographic projection apparatus uses a volume of a second liquid to confine a first liquid to a space between the projection system and the substrate. In an embodiment, the first and second liquids are substantially immiscible and may be a cycloalkane, such as cyclooctane, decalin, bicyclohexyl, exo-tetrahydro-dicyclopentadiene and cyclohexane, another high-index hydrocarbon, a perfluoropolyether, such as perfluoro-N-methylmorpholine and perfluoro E2, a perfluoroalkane, such as perfluorohexane, or a hydrofluoroether; and water, respectively.
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