Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Lih-Ping Li0
Syun-Ming Jang0
Date of Patent
January 22, 2008
0Patent Application Number
108817000
Date Filed
June 30, 2004
0Patent Primary Examiner
Patent abstract
A thin film dielectric layer comprises a top portion and a bottom portion and has density and permittivity characteristics that vary substantially uniformly from the top portion to the bottom portion. Control over the density and/or permittivity is accomplished through varying deposition parameters such as flow rate of constituent process gases or deposition chamber pressure, or through a post deposition treatment, such as plasma treatment or curing.
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