Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takayuki Kai0
Date of Patent
January 29, 2008
0Patent Application Number
113253360
Date Filed
January 5, 2006
0Patent Primary Examiner
Patent abstract
An acceleration sensor includes a mass and a supporting member linked by a flexible beam. A strain detector having low-resistance areas at both ends is formed near a boundary between the beam and the mass or between the beam and the supporting member. A dielectric film formed on the supporting member and the beam has multiple contact holes disposed over each low-resistance area. Wiring formed on the dielectric film is connected to the low-resistance areas through the contact holes. The provision of multiple contact holes for each low-resistance area extends the life of the acceleration sensor by preventing sensor failure due to the separation or other failure of any single contact.
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