Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
January 29, 2008
Patent Application Number
11245727
Date Filed
October 6, 2005
Patent Citations Received
Patent Primary Examiner
Patent abstract
In a method of controlling the temperature of a target object by measuring to obtain detected temperatures at a plurality of measurement positions and controlling a processing device such as a heater such that each detected temperature will match the corresponding one of target temperatures set for the processing device, a preliminary step is taken to determine the degrees of interference at the measurement positions by varying the target temperatures and the degrees of interference thus determined are used to correct the set target temperatures or the detected temperatures.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
