US Patent 7327555 Capacitor structure

A capacitor structure includes a first electrode structure, a second electrode structure, and a capacitor dielectric. The first electrode structure includes a plurality of first conductive plates vertically disposed and parallel to one another. The second electrode structure includes a plurality of second conductive plates disposed alternately with the first conductive plates. Each first conductive plate includes a plurality of first conductive bars electrically coupled to the first conductive bar stacked thereon with at least a first conductive via. Each second conductive plate includes a plurality of second conductive bars electrically coupled to the second conductive bar stacked thereon with at least a second conductive via.