Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kenneth William West0
Loren Neil Pfeiffer0
Date of Patent
February 12, 2008
Patent Application Number
11114828
Date Filed
April 26, 2005
Patent Primary Examiner
Patent abstract
An effusion source comprises a vitreous C filament and a heater to increase the temperature of the filament to produce a C vapor. Also described is a deposition method comprising (a) depositing a layer of material on a substrate, and (b) during step (a), heating a body of material that includes vitreous carbon so that carbon from the body is vaporized and incorporated into the deposited layer.
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