Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 12, 2008
Patent Application Number
10952761
Date Filed
September 30, 2004
Patent Primary Examiner
Patent abstract
A micromirror element is configured such that a mirror body is arranged via a support on a wiring substrate on which a pair of mirror drive electrodes and a light detection unit are arranged. A mirror is constituted of a mirror frame and a movable mirror swayably supported by the mirror frame. A light transmitting hole is formed at the center of the movable mirror. Light passing through the light transmitting hole is detected by the light detection device.
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