Patent attributes
A fabricating method of a flat panel display includes the steps of spreading an etch-resist on a thin film formed on a substrate, a polarity of the etch-resist changed by irradiation with a first light; providing a soft mold having a projected surface and a groove at an upper surface of the etch-resist at a distance from the substrate, the soft mold surface treated to be the same polarity as the etch-resist; performing a first and a second alignments of the soft mold and substrate; changing the polarity of the etch-resist by irradiation with the first light such that the etch-resist moves into a groove of the soft mold; forming an etch-resist pattern by irradiating a second light onto the etch-resist in the groove; separating the soft mold from the etch-resist pattern; and forming a thin film pattern by etching a portion of the thin film and the etch-resist pattern.
