Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ingo Uhlendorf0
Axel Brintzinger0
Date of Patent
February 26, 2008
0Patent Application Number
107332170
Date Filed
December 11, 2003
0Patent Primary Examiner
Patent abstract
A method of forming a resist layer on a non-planar surface of a substrate includes placing the non-planar surface into an electrophoretic resist. While the non-planar surface is in the electrophoretic resist, an electrical voltage is applied between the substrate and the electrophoretic resist. The non-planar surface can then be removed from the electrophoretic resist.
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