US Patent 7336361 Spectroscopic ellipsometer and polarimeter systems
Patent 7336361 was granted and assigned to J.A. Woollam Co., Inc. on February, 2008 by the United States Patent and Trademark Office.
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Patent abstract
A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system further having at least one multi-element lens and optionally being present in an environmental control chamber.
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US Patent 07336361 Spectroscopic ellipsometer and polarimeter systems US Patent 7336361 Spectroscopic ellipsometer and polarimeter systems
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Patent Number
0733636100
Patent Number
733636100
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Official Website
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
073363610
Date of Patent
February 26, 2008
0Patent Application Number
112568910
Date Filed
October 25, 2005
0Official Website
Patent Primary Examiner
Edits on 26 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
073363610
Date of Patent
February 26, 2008
0Patent Application Number
112568910
Date Filed
October 25, 2005
0Official Website
Patent Primary Examiner
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US Patent 07336361 Spectroscopic ellipsometer and polarimeter systems
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07336361
Date of patent
February 26, 2008
Patent application number
11256891
Date Filed
October 25, 2005
Patent primary examiner
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