Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shunji Mase0
Date of Patent
March 4, 2008
0Patent Application Number
113656060
Date Filed
March 2, 2006
0Patent Primary Examiner
Patent abstract
A movable sensor device includes a laminate body in which a micromechanical acting layer having a movable sensor structure and a coating layer coated on the micromechanical acting layer is successively laminated on a substrate. A draft portion penetrates through the laminate body in the lamination direction. The draft portion and a residual portion thereof are disposed at a peripheral portion of the movable sensor structure in the laminate body. The residual portion is a thin portion that is smaller in thickness than the laminate body and has a spring function.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
