US Patent 7337671 Capacitive microaccelerometers and fabrication methods
Patent 7337671 was granted and assigned to Georgia Tech Research Corporation on March, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 1, 2006
0
Date of Patent
March 4, 2008
0
Patent Application Number
11444723
0
Patent Inventor Names
Babak Vakili Amini
0
Farrokh Ayazi
0
Reza Abdolvand
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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