Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 4, 2008
Patent Application Number
10511092
Date Filed
September 8, 2003
Patent Citations Received
Patent Primary Examiner
Patent abstract
Apparatus for inspection of a sample includes a radiation source, which is adapted to direct optical radiation onto an area of a surface of the sample, and a plurality of image sensors. Each of the image sensors is configured to receive the radiation scattered from the area into a different, respective angular range, so as to form respective images of the area. An image processor is adapted to process at least one of the respective images so as to detect a defect on the surface.
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