US Patent 7340956 Built-in self test of MEMS
Patent 7340956 was granted and assigned to Carnegie Mellon University on March, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 8, 2006
Date of Patent
March 11, 2008
Patent Application Number
11370818
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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