Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ronald Walther Jeanne Severijns0
Theodorus Petrus Maria Cadee0
Marcel Johannus Elisabeth Hubertus Muitjens0
Sonia Margart Skelly0
Date of Patent
March 11, 2008
0Patent Application Number
110627730
Date Filed
February 22, 2005
0Patent Primary Examiner
Patent abstract
A lithographic apparatus comprising: an illumination system for providing a projection beam of radiation; a gas pressure controlled article clamp for clamping an article to be placed in a beam path of the projection beam of radiation; and a pressure circuit for controlling the article clamp, comprising a supply line for connection with the article clamp. According to the invention, a buffer volume is provided for providing a buffered gas pressure pulse in the supply line. In this way, faster clamp response times can be realized.
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