US Patent 7342361 Plasma source

Patent 7342361 was granted and assigned to Dublin City University on March, 2008 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Dublin City University

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7342361

Date of Patent

March 11, 2008

Patent Application Number

11127328

Date Filed

May 11, 2005

Patent Citations Received

‌

US Patent 11804362 Frequency tuning for modulated plasma systems

Patent Primary Examiner

‌

David H. Vu

Patent abstract

A plasma source is described. The source includes a reactive impedance element formed from a plurality of electrodes. By providing such a plurality of electrodes and powering adjacent electrodes out of phase with one another, it is possible to improve the characteristics of the plasma generated.

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