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US Patent 7344298 Method and apparatus for blending process materials

Patent 7344298 was granted and assigned to Celerity on March, 2008 by the United States Patent and Trademark Office.

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Patent abstract

A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals.

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