US Patent 7345290 Lens array for electron beam lithography tool
Patent 7345290 was granted and assigned to Agere Systems on March, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 7, 1999
0
Date of Patent
March 18, 2008
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Patent Application Number
09414004
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Patent Inventor Names
Victor Katsap
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Warren Kazmir Waskiewicz
0
Daniel Moonen
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Pieter Kruit
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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