US Patent 7345410 Temperature compensation of film bulk acoustic resonator devices
Patent 7345410 was granted and assigned to Agilent Technologies on March, 2008 by the United States Patent and Trademark Office.
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Patent abstract
A resonator. The resonator includes a bottom electrode overlaying at least part of a substrate, a composite structure overlaying at least part of the bottom electrode, and a top electrode overlaying at least part of the composite structure. The composite structure comprises a piezoelectric layer and a compensation layer, and the compensation layer includes silicon dioxide combined with boron.
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US Patent 07345410 Temperature compensation of film bulk acoustic resonator devices US Patent 7345410 Temperature compensation of film bulk acoustic resonator devices
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Patent Number
0734541000
Patent Number
734541000
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Current Assignee
Patent Jurisdiction
Patent Number
073454100
Date of Patent
March 18, 2008
0Patent Application Number
113863720
Date Filed
March 22, 2006
0Official Website
Patent Primary Examiner
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
073454100
Date of Patent
March 18, 2008
0Patent Application Number
113863720
Date Filed
March 22, 2006
0Official Website
Patent Primary Examiner
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US Patent 07345410 Temperature compensation of film bulk acoustic resonator devices
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07345410
Date of patent
March 18, 2008
Patent application number
11386372
Date Filed
March 22, 2006
Patent primary examiner
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