Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Casey Feinstein0
Dmitri Simonian0
Date of Patent
March 18, 2008
0Patent Application Number
108755550
Date Filed
June 23, 2004
0Patent Primary Examiner
Patent abstract
The invention provides a method and apparatus for evaluating the quality of microelectromechanical devices having deformable and deflectable members using resonation techniques. Specifically, product quality characterized in terms of uniformity of the deformable and deflectable elements is inspected with an optical resonance mapping mechanism on a wafer-level.
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