US Patent 7346093 DUV light source optical element improvements
Patent 7346093 was granted and assigned to Cymer on March, 2008 by the United States Patent and Trademark Office.
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A high power narrow band, high repetition rate laser light source optical improvement apparatus and methods are disclosed with a fast angularly positionable mirror having a mirror mounting frame, a reflective optic with a coefficient different from that of the mounting frame, at least one flexure mount fromed in the mounting frame that is flexible having flexure arm attached the flexture to the mounting frame. The apparatus may include a flexure force mechanism having an elongated rod. The force mechanism may pre-stress the flexure. The mirror maybe a grating which includes a substrate with metallic layer formed on the substrate, and a protective coating made of silica formed on the reflective metallic layer. The grating maybe actively tuned using an electro- or magneto-sensitive element. Oxides of the metal in the reflective layer may be removed by a hydrogen purge system exposed to deep ultraviolet radiation.
US Patent 07346093 DUV light source optical element improvements US Patent 7346093 DUV light source optical element improvements
US Patent 07346093 DUV light source optical element improvements
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