Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jochen Beintner0
Lars W. Liebmann0
Date of Patent
March 18, 2008
0Patent Application Number
111640760
Date Filed
November 9, 2005
0Patent Primary Examiner
Patent abstract
The present invention is directed to a method for conversion of an integrated circuit design into a set of masks for fabrication of an integrated circuit that optimizes use of an edge based image transfer mask process.
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