US Patent 7347214 Rotary shaft sealing mechanism and liquid processing apparatus
Patent 7347214 was granted and assigned to Tokyo Electron on March, 2008 by the United States Patent and Trademark Office.
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Patent Inventor Names
Koji Egashira0
Masaki Taira0
Yuji Kamikawa0
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Article (+227 characters)
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Patent abstract
The present invention provides a rotary shaft sealing mechanism having the seal between the rotary shaft and the seal ring improved, and a liquid processing apparatus including the rotary shaft sealing mechanism.
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US Patent 07347214 Rotary shaft sealing mechanism and liquid processing apparatus US Patent 7347214 Rotary shaft sealing mechanism and liquid processing apparatus
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Patent Number
073472140
Patent Number
73472140
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Official Website
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
073472140
Date of Patent
March 25, 2008
0Patent Application Number
103938820
Date Filed
March 21, 2003
0Official Website
Patent Primary Examiner
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US Patent 07347214 Rotary shaft sealing mechanism and liquid processing apparatus
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07347214
Date of patent
March 25, 2008
Patent application number
10393882
Date Filed
March 21, 2003
Patent primary examiner
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