US Patent 7347329 Substrate carrier
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Patent Inventor Names
Jeffery J. King0
John Burns0
Mark V. Smith0
Martin L. Forbes0
Matthew A. Fuller0
Michael Zabka0
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Patent abstract
A carrier for transporting silicon semiconductor wafers during semiconductor wafer processing operations including an enclosure, a door and a flange structured to interface with a machine so that the carrier can be lifted by the machine. A lift saddle connects the flange to the container so that the load on the flange is transferred to a part of the enclosure other than the top of the enclosure to prevent distortion of the enclosure to maintaining seal integrity between the enclosure and the door.
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US Patent 07347329 Substrate carrier US Patent 7347329 Substrate carrier
Infobox
Patent Number
073473290
Patent Number
73473290
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Official Website
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Infobox
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Patent Jurisdiction
Patent Number
073473290
Date of Patent
March 25, 2008
0Patent Application Number
109717140
Date Filed
October 22, 2004
0Official Website
Patent Primary Examiner
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US Patent 07347329 Substrate carrier
Infobox
Is a
Patent jurisdiction
Patent number
07347329
Date of patent
March 25, 2008
Patent application number
10971714
Date Filed
October 22, 2004
Patent primary examiner
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