US Patent 7348129 Electron beam processing method and apparatus
Patent 7348129 was granted and assigned to Tokyo Electron on March, 2008 by the United States Patent and Trademark Office.
All edits
Edits on 1 Sep, 2023
Golden AI
Edits made to:
Article (+379 characters)
Article
Patent abstract
An organic material film formed on a surface of an object to be processed is cured by electron beams irradiated thereon through a hydrocarbon radical generating gas. By employing the electron beams and the hydrocarbon radical generating gas, a deterioration of a k value of the organic material film and a reduction of a chemical resistance thereof are suppressed.
Edits on 22 Jul, 2023
Golden AI
Edits made to:
Infobox (-1 properties)
Infobox
Official Website
Edits on 15 Jul, 2023
Golden AI
Edits made to:
Infobox (+1/-1 properties)
US Patent 07348129 Electron beam processing method and apparatus US Patent 7348129 Electron beam processing method and apparatus
Infobox
Patent Number
0734812900
Patent Number
734812900
Edits on 30 Mar, 2023
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
073481290
Date of Patent
March 25, 2008
0Patent Application Number
108106330
Date Filed
March 29, 2004
0Official Website
Patent Primary Examiner
Edits on 26 Sep, 2022
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
073481290
Date of Patent
March 25, 2008
0Patent Application Number
108106330
Date Filed
March 29, 2004
0Official Website
Patent Primary Examiner
Edits on 17 Jun, 2022
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Website URL
Edits on 24 Nov, 2021
Golden AI
Edits made to:
Infobox (+8 properties)
US Patent 07348129 Electron beam processing method and apparatus
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07348129
Date of patent
March 25, 2008
Patent application number
10810633
Date Filed
March 29, 2004
Patent primary examiner
Find more entities like US Patent 7348129 Electron beam processing method and apparatus
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
