Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Naoto Miyashita0
Takashi Yoda0
Katsuya Okumura0
Kenro Nakamura0
Date of Patent
April 1, 2008
0Patent Application Number
111783180
Date Filed
July 12, 2005
0Patent Primary Examiner
Patent abstract
In manufacturing a semiconductor device, a part of an element is formed on the surface of a substrate, and at least a periphery of the substrate is polished using a polishing member stretched around the periphery of the substrate so that a polishing face of the polishing member is slid on a polishing target surface of the periphery.
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