Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Fumiharu Takahashi0
Yasushi Hara0
Akinori Shimono0
Hiroaki Hayashi0
Date of Patent
April 8, 2008
0Patent Application Number
112033770
Date Filed
August 15, 2005
0Patent Primary Examiner
Patent abstract
Cleaning compositions composed of specific amounts of carbonic acid and/or carbonate, hydrogen peroxide, aluminum fluoride and water are highly effective for cleaning electronic devices of resist, resist residues, titanium dioxide, aluminum oxide and silicon dioxide. The compositions contain no hydroxylamine and are thus free of its hazards.
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