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US Patent 7355258 Method and apparatus for bending electrostatic switch

Patent 7355258 was granted and assigned to President and Fellows of Harvard College on April, 2008 by the United States Patent and Trademark Office.

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Patent
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Patent attributes

Current Assignee
‌
President and Fellows of Harvard College
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7355258
Date of Patent
April 8, 2008
Patent Application Number
11195064
Date Filed
August 2, 2005
Patent Citations Received
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US Patent 11962214 Transport device
0
Patent Primary Examiner
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Lex Malsawma
Patent abstract

An electronic circuit is formed by closely spacing metallic gate and drain interconnects to a flexible portion of a source interconnect. A gate voltage results in electrostatic attraction and lateral mechanical movement of the flexible source interconnect portion and causes an electrical short between source and drain. VanderWaals attraction between contacting source and drain can be used to provide volatile switching (springy thicker source portion) and non-volatile switching (limp thinner source portion). In accordance with the invention, an easily fabricated, high speed, low power, radiation hard, temperature independent, integrated reconfigurable electronic circuit with embedded logic and non-volatile memory can be realized. The switch uses patterned interconnect material for its structure and can be incorporated to a 3D layered structure consisting of three dimensional interconnect in which different layers and portions of the circuits are linked through volatile and non-volatile switches.

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