Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Suk-Hee Im0
Chang-Su Lim0
Sun-Wook Park0
Date of Patent
April 15, 2008
0Patent Application Number
110188370
Date Filed
December 21, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A contamination control apparatus includes at least two pipes connected by a joint portion and configured to allow a processing fluid to flow therethrough, and a cover configured to enclose the joint portion and to provide an enclosed cavity between the cover and the joint portion. An inlet port is connected to the cover and configured to supply a gas to the cavity. An outlet port is connected to the cover and configured to exhaust the gas and a contaminant from the cavity.
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