Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 15, 2008
Patent Application Number
10950492
Date Filed
September 28, 2004
Patent Primary Examiner
Patent abstract
In etching a metal line formed as a dual layer of aluminum alloy and molybdenum, the metal line consisting of the dual layer of aluminum alloy and molybdenum is etched through one-time wet etching by applying the etchant including HNO3, HClO4, a Ferric compound (Fe3+), and a Flouro compound (F−), the process can be reduced and a metal line having a good profile can be formed.
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