US Patent 7358508 Ion implanter with contaminant collecting surface
Patent 7358508 was granted and assigned to Axcelis Technologies on April, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 10, 2005
Date of Patent
April 15, 2008
Patent Application Number
11272529
Patent Inventor Names
Michael Graf
0
Philip J. Ring
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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