US Patent 7358527 Systems and methods for testing germanium devices

Systems and methods are disclosed for a test device that is configured to allow assessment of the quality of germanium devices. In one embodiment, the test device is formed on the same substrate as the germanium devices, and includes a plurality of germanium components that are substantially similar to those found in the germanium devices. Such example measurement can used to estimate various quality parameters associated with fabrication of the germanium devices.