US Patent 7359106 Diffractive light modulator having continuously deformable surface

A light modulator and a method of manufacturing the same are provided having a continuously deformable optical surface. Generally, the modulator includes a substrate, a membrane disposed above and spaced apart from an upper surface of the substrate, the membrane having a continuously deformable light reflective surface formed on its upper side facing away from the upper surface of the substrate, and a means for deflecting the deformable surface relative to the substrate. Light reflected from different points of the deformable surface can interfere to modulate light reflected from the modulator in 0th order applications. In one embodiment, the membrane includes a static reflective surface surrounding the deformable surface. Light reflected from the static surface and the deformable surface can interfere to modulate light reflected from the modulator in non-0th order applications. Preferably, the static surface is substantially planar and the deformable surface are sized and shaped to define substantially equal areas. In one embodiment, the static surface circumscribes the deformable surface to define a parabolic reflector.