Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takenori Yoshizawa0
Date of Patent
April 22, 2008
0Patent Application Number
107176200
Date Filed
November 21, 2003
0Patent Primary Examiner
Patent abstract
A substrate cleaning device is provided, which comprises a first cleaning room including a first cleaning portion for cleaning a substrate placed therein, and a second cleaning room including a second cleaning portion for cleaning a substrate provided therein. The first cleaning room is stacked on the second cleaning room so that at least a portion of the first cleaning room overlaps at least a portion of the second cleaning room.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
