US Patent 7361387 Plasma enhanced pulsed layer deposition
Patent 7361387 was granted and assigned to Tegal Corporation on April, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 23, 2003
0
Date of Patent
April 22, 2008
0
Patent Application Number
10744889
0
Patent Inventor Names
Tue Nguyen
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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