Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
April 22, 2008
Patent Application Number
11145941
Date Filed
June 7, 2005
Patent Primary Examiner
Patent abstract
The present invention discloses an etching apparatus comprising an etching bath having an etchant; an etchant recycling part in the etching bath; a DI and undiluted etchant supply part for supplying a DI water and a undiluted etchant; an etchant mixing part for mixing the DI water and the undiluted etchant; and an etchant heating part for heating the mixed etchant.
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