US Patent 7361920 Substrate processing apparatus and transfer positioning method thereof
Patent 7361920 was granted and assigned to Tokyo Electron on April, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
December 16, 2005
Date of Patent
April 22, 2008
Patent Application Number
11304685
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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