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US Patent 7363802 Measurement device for electron microscope

Patent 7363802 was granted and assigned to Nanofactory Instruments on April, 2008 by the United States Patent and Trademark Office.

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Patent abstract

This invention relates to a measurement device for use in an electron microscope. The device comprises a sample holder, for holding a sample to be studied, and an indentation tip, being arranged in proximity of the sample holder, whereby an interaction between the sample and the tip is arranged to be measured. The measurement device comprises a force sensor being positioned in proximity with an interaction area of the sample and the tip and is arranged to directly measure a force resulting from interaction between the sample and the tip.

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